GWMS Oil free Ultrahigh Vacuum Unit

GWMS oil free ultrahigh vacuum unit is combined turbo molecular pump, gate or angle valve, connect hose, solenoid valves, vacuum meter and GWSP oil free scroll vacuum pump in an integrated unit for oil free ultra high vacuum pumping.

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Specifications Applications

Model		GWMS100/150	GWMS300/150	GWMS600/300	GWMS1200/600	GWMS1600/1000
Molecular Pump Model		FF-100	FF-300	FF-600	FF-1200	FF-1600
Scroll Pump Model		GWSP150	GWSP150	GWSP300	GWSP600	GWSP1000
Pumping Speed	l/s	110	300	500	1200	1600
	l/min	6.6*10³	1.8*10⁴	3.0*10⁴	7.2*10⁴	9.6*10⁴
	m³/h	3.9*10²	1.1*10³	1.8*10³	4.3*10⁴	5.8*10⁴
	cfm	2.2*10²	6.0*10²	1.0*10³	2.5*10⁴	3.4*10⁴
Ultimate Pressure	Pa	≤1.0*10^-5	≤1.0*10^-5	≤1.0*10^-5	≤1.0*10^-5	≤1.0*10^-5
	mbar	≤1.0*10^-7	≤1.0*10^-7	≤1.0*10^-7	≤1.0*10^-7	≤1.0*10^-7
	Torr	≤7.5*10^-8	≤7.5*10^-8	≤7.5*10^-8	≤7.5*10^-8	≤7.5*10^-8
	psi	≤1.4*10^-9	≤1.4*10^-9	≤1.4*10^-9	≤1.4*10^-9	≤1.4*10^-9
Noise Level	dB(A)	≤63	≤63	≤63	≤63	≤63
Inlet/Exhaust Flange		CF100/KF16	CF150/KF16	CF150/KF16	CF200/KF16	CF250/KF16*2
Start Time	min	<3
Inlet/Exhaust Pressure	MPa	0.1/0.13
Ambient Operation Temp.	℉	41～104
Cooling Type		Air cooled
Motor		1 phase / 3 phase , 220V / 380V, 50Hz / 60Hz
Dimensions	mm	500510680	730570700	730570700	950570730	990630880

Safety Precautions

The GWMS series oil free scroll vacuum units are suitable for clean processes only.

Do not pump toxic, explosive, flammable or corrosive substances or substances which contain chemicals, solvents or particles. GEOWELL will not perform maintenance work on products which have used special gases or other hazardous substances.

Be sure the inlet gas temperature must be lower than 122℉.

Features & Benefits

Wide product lineup

Suitable for all power supply around the world

Create oil-free ultra high vacuum

Limit vacuum high up to 6*10^-7Pa

No oil, no pollution to pumping cavity & environment

Low vibration, low noise and high efficiency

Ease of maintenance

Applications

Leak detection

Accelerators